PRODUCTS / Semi/E-glass / miDALIX
miDALIX DALI
- Introduction
General |
Substrate size,mm from sub-millimeter to 100 x 100 x 10 |
Supported photoresists All common photoresists |
Optical Characteristics |
Laser wavelength, nm 375 or 405 |
Beam spot size, μm 1 and 3 (software-selectable) |
Performance |
Hz: 100,000 Structure aspect ratio: more than 1:20(up to 1:40) |
Writing resolution(beam positioning): True sub-nanometer Minimum structure size, um: <1 Multilayer alignment accuracy, um: 0.5 |
User Interface |
Data Input formats : Intuitive CAD software for design, alignment, advanced anchoring and exposure control |
Integrated optical monochrome or color Microscope for inspection and alignment |
Technical data |
Operating temperature,°C: 21.5 ±1.5 System dimensions, mm: 650 x 626 x 522 (W x D x H) Electrical supply voltage: 110230 VACA, 50/60Hz Chiller data: 133 x 483 x 559 mm3 (19” rack, 3U), 15kg 250W cooling capacity |
Operating relative humidity, %: <80, non-condensing System weight, kg:77 Power consumption, VA: <120 Hardware/software requirements: Windows 10 / 8.1 / 8, 64 bit, 3GHz processor with SSE2 higher, 4GB of RAM and 16GB available hard disk space |
All inclusive |
The DaLI system is shipped with the chiller, all connecting cables, coolant hoses and the Proprietary DaLI software. |