PRODUCTS / Semi/E-glass / miDALIX

    miDALIX DALI

    Download: miDALIX DaLI brochure
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    • Introduction
    • Specification
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    General

    Substrate size,mm

     from sub-millimeter  to 100 x 100 x 10

    Supported photoresists

    All common photoresists

    Optical

    Characteristics

    Laser wavelength, nm

     375 or 405

    Beam spot size, μm

    1 and 3 (software-selectable)

    Performance

     

    Writing speed(spots per second),

    Hz: 100,000

    Structure aspect ratio:

    more than 1:20(up to 1:40)

    Writing resolution(beam positioning):

    True sub-nanometer

    Minimum structure size, um: <1

    Multilayer alignment accuracy, um: 0.5

    User Interface

    Data Input formats DXF, BMP

    Intuitive CAD software for design, alignment, advanced anchoring and exposure control

     

    Integrated optical monochrome or color

    Microscope for inspection and alignment

    Technical data

    Operating temperature,°C: 21.5 ±1.5

    System dimensions, mm:

    650 x 626 x 522 (W x D x H)

    Electrical supply voltage:

    110230 VACA, 50/60Hz

    Chiller data:

    133 x 483 x 559 mm3

    (19” rack, 3U), 15kg

    250W cooling capacity

    Operating relative humidity, %:

    <80, non-condensing

    System weight, kg:77

    Power consumption, VA:

    <120

    Hardware/software requirements:

    Windows 10 / 8.1 / 8, 64 bit, 3GHz processor with SSE2 higher, 4GB of RAM and 16GB available hard disk space

    All inclusive

    The DaLI system is shipped with the chiller, all connecting cables, coolant hoses and the Proprietary DaLI software.