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Home  > Product > Wafer/Panel/Solar > Femtika Femtosecond Laser

Laser Nanofactory
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Laser Nanofactory Specifications

Femtosecond

Laser Suurce

Wavelength

1028 nm ± 5 nm and 514 nm ± 5 nm

Pulse duration

<290 fs - 10 ps

Pulse energy

>65 μJ

Max average power

>4 W

Repetition rate

60 - 1000 kHz

Cooling method

Air-cooled

Nanopositioning:

Linear stages with synchronized galvanoscanners

Travel(XY)

160 mm x 160 mm

Travel(Z)

60mm

Accuracy

± 300 nm (XY), ± 275 nm (Z)

XYZ orthogonality

3 arc sec

Resolution

1 nm (XY), 2 nm (Z)

Maximum speed

350 mm/s (YX), 200 mm/s (Z)